GB/T 32386-2015
Gases for electronic industry.Tungsten hexaflouride (English Version)

Standard No.
GB/T 32386-2015
Language
Chinese, Available in English version
Release Date
2015
Published By
General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
Latest
GB/T 32386-2015
Scope
This standard specifies the technical requirements, test methods, packaging, marking, storage, transportation and safety of tungsten hexafluoride. This standard applies to tungsten hexafluoride produced by chemical synthesis and refined and purified. This product is mainly used in the metal tungsten chemical vapor deposition process and the preparation of tungsten materials in the electronic industry. Molecular formula: WF6. Molecular weight: 297.830 419 2 (calculated according to the international relative atomic mass in 2009).

GB/T 32386-2015 Referenced Document

  • GB 14193 Rules for filling of liquefied gas cylinders
  • GB 15258 General rules for preparation of precautionary label for chemicals
  • GB 16804 Precautionary labels for gas cylinders
  • GB 190 Packing symbol of dangerous goods
  • GB 5099 Seamless steel gas cylinders
  • GB 7144 Coloured cylinder mark for gases
  • GB/T 26571 Specification for the shelf life of a specialty gas
  • GB/T 28726 Gas analysis.Gas chromatograph with helium ionization detector
  • GB/T 3723 Sampling of chemical products for industrial use--Safety in sampling
  • GB/T 5275.10 Gas analysis.Preparation of calibration gas mixtures using dynamic volumetric methods.Part 10:Permeation method

GB/T 32386-2015 history




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