KS I ISO 14644-6:2009
Cleanrooms and associated controlled environments-Part 6:Vocabulary
- Standard No.
- KS I ISO 14644-6:2009
- Release Date
- 2009
- Published By
- Korean Agency for Technology and Standards (KATS)
- Status
- 2014-12
- Replace By
- KS I ISO 14644-6:2014
- Latest
- KS I ISO 14644-6-2022
- Scope
- This standard describes terms and definitions related to clean rooms and related control environments. This standard is KS
KS I ISO 14644-6:2009 history
- 2022 KS I ISO 14644-6-2022 Cleanrooms and associated controlled environments — Part 6: Vocabulary
- 2017 KS I ISO 14644-6:2017 Cleanrooms and associated controlled environments — Part 6: Vocabulary
- 2014 KS I ISO 14644-6:2014 Cleanrooms and associated controlled environments — Part 6: Vocabulary
- 2009 KS I ISO 14644-6:2009 Cleanrooms and associated controlled environments-Part 6:Vocabulary
