KS I ISO 14644-6:2014
Cleanrooms and associated controlled environments — Part 6: Vocabulary

Standard No.

KS I ISO 14644-6:2014

Release Date

2014

Published By

Korean Agency for Technology and Standards (KATS)

Status

Withdraw

Replace By

KS I ISO 14644-6:2017

Latest

KS I ISO 14644-6-2017(2022)

Replace

KS I ISO 14644-6:2009

KS I ISO 14644-6:2014 history

• 0000 KS I ISO 14644-6-2017(2022)
• 2017 KS I ISO 14644-6:2017 Cleanrooms and associated controlled environments — Part 6: Vocabulary
• 2014 KS I ISO 14644-6:2014 Cleanrooms and associated controlled environments — Part 6: Vocabulary
• 2009 KS I ISO 14644-6:2009 Cleanrooms and associated controlled environments-Part 6:Vocabulary