KS I ISO 14644-6-2022
Cleanrooms and associated controlled environments — Part 6: Vocabulary

Standard No.

KS I ISO 14644-6-2022

Release Date

2022

Published By

Korean Agency for Technology and Standards (KATS)

Latest

KS I ISO 14644-6-2022

KS I ISO 14644-6-2022 history

• 2022 KS I ISO 14644-6-2022 Cleanrooms and associated controlled environments — Part 6: Vocabulary
• 2017 KS I ISO 14644-6:2017 Cleanrooms and associated controlled environments — Part 6: Vocabulary
• 2014 KS I ISO 14644-6:2014 Cleanrooms and associated controlled environments — Part 6: Vocabulary
• 2009 KS I ISO 14644-6:2009 Cleanrooms and associated controlled environments-Part 6:Vocabulary