JC/T 2243-2014
Quartz tube covered in a film for PECVD (English Version)
- Standard No.
- JC/T 2243-2014
- Language
- Chinese, Available in English version
- Release Date
- 2014
- Published By
- Professional Standard - Building Materials
- Status
- Latest
- JC/T 2243-2014
- Replace By
- KS B 4063-2014
- Scope
- This standard specifies the terms and definitions, materials, requirements, test methods, inspection rules, marking, packaging, transportation and storage of coated quartz tubes for plasma enhanced chemical vapor deposition processes. This standard applies to coated quartz tubes (hereinafter referred to as PE quartz tubes) used in plate plasma enhanced chemical vapor deposition processes.
JC/T 2243-2014 Referenced Document
- JC/T 2066-2011 Quartz glass diffusion tubes for silicon for solar cell
- JC/T 597-2011 Transparent quartz glass tubes for semiconductor
- JC/T 598 Transparent quartz tubes for electrical lighting source
JC/T 2243-2014 history
- 2014 JC/T 2243-2014 Quartz tube covered in a film for PECVD
JC/T 2243-2014 Quartz tube covered in a film for PECVD was changed to KS B 4063-2014 Straight-sided power presses — Characteristics and dimensions.
