This standard specifies the terms and definitions, classification and labeling, requirements, test methods, inspection rules, marking, packaging, transportation and storage of transparent quartz glass tubes for semiconductors. This standard applies to transparent quartz glass tubes (hereinafter referred to as quartz glass tubes) used in the production of the semiconductor industry. Transparent quartz glass tubes used in the metallurgical and chemical industries can also refer to this standard.
JC/T 597-2011 Referenced Document
GB/T 10701 Test methods for thermal stability of silica glass
GB/T 12442 Test method for the hydroxyl groups content of silica glass*, 2019-08-30 Update
GB/T 3284 Analytical method of the chemical composition in the quartz glass*, 2015-10-09 Update
GB/T 4121 Test method for stability to thermal darkening of quartz glass*, 2014-07-24 Update
GB/T 5949 Test method for bubble and air line of transparent quartz glass*, 2014-07-24 Update
JC/T 597-2011 history
2011JC/T 597-2011 Transparent quartz glass tubes for semiconductor
1995JC/T 597-1995 Transparent quartz glass tubes for semiconductors