This part of the ISO 14644 series specifies the classification system for surface cleanliness in clean rooms with respect to chemical compounds or elements (including molecules, ions, atoms and particles) present. This part of the ISO 14644 series applies to all solid surfaces in clean rooms and associated clean room areas, such as: B. Walls, ceilings, floors, work areas, tools, equipment and devices. NOTE 1 For the application of this part of ISO 14644, only the chemical properties of a particle are taken into account. The physical properties of the particle are not taken into account and this part of the ISO 14644 series does not address the interaction between the contamination and the surface. NOTE 2 This part of the ISO 14644 series does not cover the contamination generation process and time-dependent influences (deposition, sedimentation, aging, etc.) or process-dependent activities such as: B. Transport and handling. It also does not contain any guidelines on statistical quality control procedures to ensure conformity.
EN ISO 14644-10:2013 Referenced Document
ISO 14644-1:1999 Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness
ISO 14644-6:2007 Cleanrooms and associated controlled environments - Part 6: Vocabulary
EN ISO 14644-10:2013 history
2022EN ISO 14644-10:2022 Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022)
2013EN ISO 14644-10:2013 Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration