EN ISO 14644-10:2022 Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022)
This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices. NOTE 1 For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface. NOTE 2 This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.
EN ISO 14644-10:2022 history
2022EN ISO 14644-10:2022 Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022)
2013EN ISO 14644-10:2013 Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration