ISO 14644-6:2007
Cleanrooms and associated controlled environments - Part 6: Vocabulary

Standard No.

ISO 14644-6:2007

Release Date

2007

Published By

International Organization for Standardization (ISO)

Latest

ISO 14644-6:2007

Scope

This part of ISO 14644 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments.This part of ISO 14644 is a compendium of the terms and definitions given in the other parts of ISO 14644.It also includes the terms and definitions given in ISO 14698-1 and ISO 14698-2.

ISO 14644-6:2007 history

• 2007 ISO 14644-6:2007 Cleanrooms and associated controlled environments - Part 6: Vocabulary