GB/T 17874-2010
Gases for electronic industry.Boron trichloride (English Version)
- Standard No.
- GB/T 17874-2010
- Language
- Chinese, Available in English version
- Release Date
- 2011
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Status
- 2022-05
- Replace By
- GB/T 17874-2021
- Latest
- GB/T 17874-2021
- Replace
- GB/T 17874-1999
- Scope
- This standard specifies the technical requirements, test methods, signs, packaging, storage and transportation and safety of boron trichloride. This standard is applicable to the boron trichloride obtained from crude boron trichloride as raw material, which is purified by adsorption, rectification and other methods. It is mainly used in the processes of diffusion, ion implantation and dry etching used in the production of semiconductor devices.
GB/T 17874-2010 Referenced Document
- GB 14193 Rules for filling of liquefied gas cylinders
- GB 190 Packing symbol of dangerous goods
- GB 5099 Seamless steel gas cylinders
- GB 7144 Coloured cylinder mark for gases
- GB/T 26571 Specification for the shelf life of a specialty gas*， 2011-06-16 Update
- GB/T 3723 Sampling of chemical products for industrial use--Safety in sampling
- GB/T 8984 Determination of carbon monoxide, carbon dioxide and hydrocarbon in gases. Gas chromatographic method
GB/T 17874-2010 history
- 2021 GB/T 17874-2021 Electronic specialty gas—Boron trichloride
- 2011 GB/T 17874-2010 Gases for electronic industry.Boron trichloride
- 1999 GB/T 17874-1999 Gases for electronic industry--Boron Trichloride
