GB/T 17874-1999
Gases for electronic industry--Boron Trichloride (English Version)
- Standard No.
- GB/T 17874-1999
- Language
- Chinese, Available in English version
- Release Date
- 1999
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Status
- 2011-05
- Replace By
- GB/T 17874-2010
- Latest
- GB/T 17874-2021
- Scope
- This standard specifies the requirements, inspection methods, inspection rules, packaging, marking, transportation, storage and safety requirements for boron trichloride gas used in the electronics industry. This standard is applicable to the boron trichloride obtained by using crude boron trichloride as raw material and purified by adsorption and distillation methods. It is mainly used in the diffusion, ion implantation and dry methods used in the production of silicon semiconductor devices and integrated circuits in the electronics industry. Etching and other processes.
GB/T 17874-1999 history
- 2021 GB/T 17874-2021 Electronic specialty gas—Boron trichloride
- 2011 GB/T 17874-2010 Gases for electronic industry.Boron trichloride
- 1999 GB/T 17874-1999 Gases for electronic industry--Boron Trichloride
