GB/T 14140-2009
Test method for measuring diameter of semiconductor wafer (English Version)

Standard No.

GB/T 14140-2009

Language

Chinese, Available in English version

Release Date

2009

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 14140-2009

Replace

GB/T 14140.1-1993 GB/T 14140.2-1993

Scope

This standard specifies the method for measuring the diameter of silicon wafers with an optical projector. This standard is suitable for measuring the diameter of circular silicon wafers, and the maximum diameter that can be measured is ∮300mm. Not suitable for measuring the out-of-roundness of silicon wafers.

GB/T 14140-2009 Referenced Document

• GB/T 12964-2003 Monocrystalline silicon polished wafers
• GB/T 2828.1-2003 Sampling procedures for inspection by attributes--Part 1: Sampling schemes indexed by acceptance quality limit(AQL) for lot-by-lot inspection
• GB/T 6093-2001 Geometrical product specifications(GPS)--Length standards--Gauge blocks

GB/T 14140-2009 history

• 2009 GB/T 14140-2009 Test method for measuring diameter of semiconductor wafer
• 1993 GB/T 14140.2-1993 Silicon slices and wafers--Measuring of diameter--Micrometer method