GB/T 14140.2-1993
Silicon slices and wafers--Measuring of diameter--Micrometer method (English Version)
- Standard No.
- GB/T 14140.2-1993
- Language
- Chinese, Available in English version
- Release Date
- 1993
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Status
- 2010-06
- Replace By
- GB/T 14140-2009
- Latest
- GB/T 14140-2009
- Scope
- This standard specifies the method for measuring the diameter of silicon wafers with a micrometer. This standard applies to measuring the diameter of circular silicon wafers. The measuring range is φ25～φ100mm. This standard does not apply to the measurement of out-of-roundness of silicon wafers.
GB/T 14140.2-1993 history
- 2009 GB/T 14140-2009 Test method for measuring diameter of semiconductor wafer
- 1993 GB/T 14140.2-1993 Silicon slices and wafers--Measuring of diameter--Micrometer method
