GB/T 14140.1-1993
Silicon slices and wafers--Measuring of diameter--Optical projecting method (English Version)
- Standard No.
- GB/T 14140.1-1993
- Language
- Chinese, Available in English version
- Release Date
- 1993
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Status
- 2010-06
- Replace By
- GB/T 14140-2009
- Latest
- GB/T 14140-2009
- Scope
- This standard specifies the method for measuring the diameter of silicon wafers with an optical projector. This standard applies to measuring the diameter of circular silicon wafers. The measuring range is φ40～φ100mm. This standard does not apply to the measurement of out-of-roundness of silicon wafers. This standard is used as a referee measurement method.
GB/T 14140.1-1993 history
- 2009 GB/T 14140-2009 Test method for measuring diameter of semiconductor wafer
- 1993 GB/T 14140.1-1993 Silicon slices and wafers--Measuring of diameter--Optical projecting method
GB/T 14140.1-1993 Silicon slices and wafers--Measuring of diameter--Optical projecting method was changed to GB/T 14140-2009 Test method for measuring diameter of semiconductor wafer.
