GB/T 25915.13-2022
Cleanrooms and associated controlled environments—Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (English Version)

Standard No.

GB/T 25915.13-2022

Language

Chinese, Available in English version

Release Date

2022

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 25915.13-2022

Scope

This document provides guidance on the cleaning of cleanroom surfaces, equipment surfaces and material surfaces to achieve the required cleanliness. Surfaces in this document refer to all surfaces (external, internal). This document provides the cleaning methods required to assess particle concentration (SCP) and surface chemical cleanliness (SCC) cleanliness to achieve surface cleanliness, and cleaning techniques that should be considered to achieve specified cleanliness. ISO14644.9 and ISO14644.10 give the suitability rate of cleaning technology and related testing methods. This document contains the following general guidance: — surface target cleanliness class; — suitability of cleaning methods; — compatibility of surfaces with cleaning techniques; — assessment of cleaning method suitability. This document does not cover the following matters: --- classification of cleaning methods; --- products produced in clean rooms; --- specific cleaning methods related to specific surfaces; --- cleaning mechanisms, specific methods and methods of various cleaning methods - detailed description of the procedure; - detailed description of the material properties; - the mechanism of surface damage by the cleaning process and cleaning time; - the adhesion of pollutants to the surface, and the adhesion process usually related to time and process ; ——other characteristics of particles, such as static electricity, ions, etc.; ——chemical reaction between molecular pollutants and surfaces; ——surface microorganisms; ——radioactive contamination; ——health and safety; ——environment Factors, such as: waste treatment, discharge, etc.; --- Selection of statistical methods.

GB/T 25915.13-2022 Referenced Document

• ISO 14644-8 Cleanrooms and associated controlled environments — Part 8: Assessment of air cleanliness by chemical concentration (ACC)
• ISO 14644-9 Cleanrooms and associated controlled environments — Part 9: Assessment of surface cleanliness for particle concentration

GB/T 25915.13-2022 history

• 2022 GB/T 25915.13-2022 Cleanrooms and associated controlled environments—Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications

GB/T 25915.13-2022 -All Parts