GB/T 25915.10-2021
Cleanrooms and associated controlled environments—Part 10: Classification of surface cleanliness by chemical concentration (English Version)

Standard No.

GB/T 25915.10-2021

Language

Chinese, Available in English version

Release Date

2021

Published By

国家市场监督管理总局、中国国家标准化管理委员会

Latest

GB/T 25915.10-2021

Scope

This document defines a surface cleanliness grading system for the presence of compounds or chemical substances (including molecules, ions, atoms, particles) in a clean room. This document applies to all surfaces in clean rooms and related controlled environments, such as walls, ceilings, floors, work environments, tools, equipment and devices. Note 1: This document only considers the chemical properties of the microparticles, not the physical properties of the microparticles. This document does not cover interactions between contaminants and surfaces. Note 2: This document does not involve the process of pollution generation, nor does it involve time-related influencing factors (sedimentation, deposition, aging, etc.) A guide to statistical quality control techniques.

GB/T 25915.10-2021 Referenced Document

• GB/T 25915.6 Cleanrooms and associated controlled environments.Part 6:Vocabulary

GB/T 25915.10-2021 history

• 2021 GB/T 25915.10-2021 Cleanrooms and associated controlled environments—Part 10: Classification of surface cleanliness by chemical concentration

GB/T 25915.10-2021 -All Parts