General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
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GB/T 25915.14-2022
Scope
This document is applicable to assess the suitability of equipment such as machinery, test equipment, process equipment, components and tools for use in cleanrooms and related controlled environments. According to GB/T25915.1, the particle size range of suspended particles of concern is 0.1 μm to greater than or equal to 5 μm. This document is not applicable to: --- assessment of suitability based on microbial contamination; --- testing of suitability of cleaning agents and cleaning techniques; --- cleanability of equipment and materials; --- equipment design and material selection --- Static, thermal and other physical properties of materials; --- Optimization of equipment performance in specific process occasions; --- Selection of test statistical methods; --- Clauses and requirements of local safety regulations.
GB/T 25915.14-2022 Referenced Document
GB/T 25915.1-2021 Cleanrooms and associated controlled environments—Part 1: Classification of air cleanliness by particle concentration
GB/T 25915.14-2022 history
2022GB/T 25915.14-2022 Cleanrooms and Related Controlled Environments Part 14: Assessing Equipment Suitability by Particle Concentration