GB/T 14603-1993
Gases for electronic industry. Boron trifluoride (English Version)
- Standard No.
- GB/T 14603-1993
- Language
- Chinese, Available in English version
- Release Date
- 1993
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Status
- 2010-05
- Replace By
- GB/T 14603-2009
- Latest
- GB/T 14603-2009
- Scope
- This standard specifies the technical requirements, test methods, inspection rules, packaging, marking, transportation, storage and safety requirements of boron trifluoride products. This standard applies to boron trifluoride prepared by thermal decomposition method using sodium fluoroborate as raw material. It is mainly used for ion implantation and doping in the production of semiconductor devices and integrated circuits. Molecular formula: BF3 Relative molecular mass: 67.805 (according to the international relative atomic mass in 1989)
GB/T 14603-1993 history
- 2009 GB/T 14603-2009 Gases for electronic industry.Boron trifluoride
- 1993 GB/T 14603-1993 Gases for electronic industry. Boron trifluoride
