GB/T 14603-2009
Gases for electronic industry.Boron trifluoride (English Version)
- Standard No.
- GB/T 14603-2009
- Language
- Chinese, Available in English version
- Release Date
- 2009
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Latest
- GB/T 14603-2009
- Replace
- GB/T 14603-1993
- Scope
- This standard specifies the technical requirements, test methods, inspection rules, signs, packaging, transportation, storage and safety requirements for boron trifluoride used in the electronics industry. This standard applies to boron trifluoride produced by direct compounding and purification using fluorine gas and simple boron as raw materials; and boron trifluoride produced by thermal decomposition of sodium fluoroborate as raw material and purified Boron. It is mainly used for ion implantation and doping in the production of semiconductor devices and integrated circuits.
GB/T 14603-2009 Referenced Document
- GB 14194-2006 Rules for filling of permanent gas cylinders
- GB 190-2009 Packing symbol of dangerous goods
- GB 7144-1999 Coloured cylinder mark for gases
- GB/T 3723-1999 Sampling of chemical products for industrial use--Safety in sampling
GB/T 14603-2009 history
- 2009 GB/T 14603-2009 Gases for electronic industry.Boron trifluoride
- 1993 GB/T 14603-1993 Gases for electronic industry. Boron trifluoride
