IEC 62047-1:2016
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

Standard No.

IEC 62047-1:2016

Release Date

2016

Published By

International Electrotechnical Commission (IEC)

Latest

IEC 62047-1:2016

Replace

IEC 47F/232/FDIS:2015 IEC 62047-1:2005

Scope

This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.

IEC 62047-1:2016 history

• 2016 IEC 62047-1:2016 Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
• 2005 IEC 62047-1:2005 Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions