IEC 62047-1:2005
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

Standard No.

IEC 62047-1:2005

Release Date

2005

Published By

International Electrotechnical Commission (IEC)

Status

Be replaced 2016-01

Replace By

IEC 62047-1:2016

Latest

IEC 62047-1:2016

Replace

IEC 47/1821/FDIS:2005

Scope

This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.

IEC 62047-1:2005 history

• 2016 IEC 62047-1:2016 Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
• 2005 IEC 62047-1:2005 Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions