ISO 14644-1 Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration
ISO 14644-6 Cleanrooms and associated controlled environments - Part 6: Vocabulary
GOST R ISO 14644-10-2014 history
2014GOST R ISO 14644-10-2014 Cleanrooms and associated controlled environments. Part 10. Classification of surface cleanliness by chemical concentration