GB/T 31058-2014
Gases for electronic industry.Silicon tetrafluoride (English Version)

Standard No.
GB/T 31058-2014
Language
Chinese, Available in English version
Release Date
2014
Published By
General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
Latest
GB/T 31058-2014
Scope
This standard specifies the technical requirements, test methods, signs, packaging, transportation and storage of silicon tetrafluoride. This standard applies to silicon tetrafluoride prepared by fluorite sulfuric acid method, thermal decomposition method of hexafluorosilicate, and direct fluorination of elemental silicon. It is mainly used as a raw material for plasma etching, P-type doping of light-emitting diodes, ion implantation process, epitaxial deposition and diffusion of silicon source and high-purity quartz glass for optical fiber in the electronic industry, and is also an important raw material for polysilicon production. Molecular formula: SiF4. Relative molecular mass: 104.0786128 (according to the international atomic relative mass in 2009).

GB/T 31058-2014 Referenced Document

  • GB 14194 Rules for filling of permanent gas cylinders
  • GB 15258 General rules for preparation of precautionary label for chemicals
  • GB 16804 Precautionary labels for gas cylinders
  • GB 190 Packing symbol of dangerous goods
  • GB 5099 Seamless steel gas cylinders
  • GB 7144 Coloured cylinder mark for gases
  • GB/T 26571 Specification for the shelf life of a specialty gas
  • GB/T 28726-2012 Gas analysis.Gas chromatograph with helium ionization detector
  • GB/T 28727 Gas analysis.Determination of sulfides.Gas chromatograph with flame photometric detector
  • GB/T 3723 Sampling of chemical products for industrial use--Safety in sampling

GB/T 31058-2014 history

Gases for electronic industry.Silicon tetrafluoride



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