General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
Latest
GB/T 31058-2014
Scope
This standard specifies the technical requirements, test methods, signs, packaging, transportation and storage of silicon tetrafluoride. This standard applies to silicon tetrafluoride prepared by fluorite sulfuric acid method, thermal decomposition method of hexafluorosilicate, and direct fluorination of elemental silicon. It is mainly used as a raw material for plasma etching, P-type doping of light-emitting diodes, ion implantation process, epitaxial deposition and diffusion of silicon source and high-purity quartz glass for optical fiber in the electronic industry, and is also an important raw material for polysilicon production. Molecular formula: SiF4. Relative molecular mass: 104.0786128 (according to the international atomic relative mass in 2009).
GB/T 31058-2014 Referenced Document
GB 14194 Rules for filling of permanent gas cylinders
GB 15258 General rules for preparation of precautionary label for chemicals