DIN EN 62047-21:2015
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (IEC 62047-21:2014); German version EN 62047-21:2014
- Standard No.
- DIN EN 62047-21:2015
- Release Date
- 2015
- Published By
- German Institute for Standardization
- Status
- Replace By
- DIN EN 62047-21:2015-04
- Latest
- DIN EN 62047-21:2015-04
- Replace
- DIN EN 62047-21:2012
DIN EN 62047-21:2015 Referenced Document
- ASTM E132-04 Standard Test Method for Poisson''s Ratio at Room Temperature*， 2023-12-21 Update
DIN EN 62047-21:2015 history
- 2015 DIN EN 62047-21:2015-04 Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (IEC 62047-21:2014); German version EN 62047-21:2014
- 2015 DIN EN 62047-21:2015 Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (IEC 62047-21:2014); German version EN 62047-21:2014
- 1970 DIN EN 62047-21 E:2012-11
- 0000 DIN EN 62047-21:2012
