DIN EN 62047-21 E:2012-11
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
- Standard No.
- DIN EN 62047-21 E:2012-11
- Release Date
- 1970
- Published By
- /
- Status
- Replace By
- DIN EN 62047-21:2015
- Latest
- DIN EN 62047-21:2015-04
DIN EN 62047-21 E:2012-11 history
- 2015 DIN EN 62047-21:2015-04 Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (IEC 62047-21:2014); German version EN 62047-21:2014
- 2015 DIN EN 62047-21:2015 Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (IEC 62047-21:2014); German version EN 62047-21:2014
- 1970 DIN EN 62047-21 E:2012-11 Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
