KS C 0256-2002
Testing method of resistivity for silicon crystals and silicon wafers with four - point probe

Standard No.

KS C 0256-2002

Release Date

2002

Published By

Korean Agency for Technology and Standards (KATS)

Status

Be replaced

Replace By

KS C 0256-2002(2017)

Latest

KS C 0256-2022

Replace

KS C 0256-1999

Scope

This standard applies to silicon single crystals (hereinafter referred to as single crystals) and silicon wafers (hereinafter referred to as wafers).

KS C 0256-2002 history

• 2022 KS C 0256-2022 Testing method of resistivity for silicon crystals and silicon wafers with four - point probe
• 0000 KS C 0256-2002(2017)
• 2002 KS C 0256-2002 Testing method of resistivity for silicon crystals and silicon wafers with four - point probe
• 0000 KS C 0256-1999