ASTM E2246-11e1
Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer
- Standard No.
- ASTM E2246-11e1
- Release Date
- 2011
- Published By
- American Society for Testing and Materials (ASTM)
- Status
- Replace By
- ASTM E2246-11(2018)
- Latest
- ASTM E2246-11(2018)
- Scope
5.1 Strain gradient values are an aid in the design and fabrication of MEMS devices.
1.1 This test method covers a procedure for measuring the strain gradient in thin, reflecting films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which can be imaged using an optical interferometer, also called an interferometric microscope. Measurements from cantilevers that are touching the underlying layer are not accepted.
1.2 This test method uses a non-contact optical interferometric microscope with the capability of obtaining topographical 3-D data sets. It is performed in the laboratory.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
ASTM E2246-11e1 Referenced Document
- ASTM E2244 Standard Test Method for In-Plane Length Measurements of Thin, Reflecting Films Using an Optical Interferometer
- ASTM E2245 Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer
- ASTM E2444 Terminology Relating to Measurements Taken on Thin, Reflecting Films
- ASTM E2530 Standard Practice for Calibrating the Z-Magnification of an Atomic Force Microscope at Subnanometer Displacement Levels Using Si(111) Monatomic Steps
ASTM E2246-11e1 history
- 2018 ASTM E2246-11(2018) Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer
- 2011 ASTM E2246-11e1 Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer
- 2011 ASTM E2246-11 Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer
- 2005 ASTM E2246-05 Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer
- 2002 ASTM E2246-02 Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer
