ASTM E2246-05
Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer

Standard No.

ASTM E2246-05

Release Date

2005

Published By

American Society for Testing and Materials (ASTM)

Status

Be replaced

Replace By

ASTM E2246-11

Latest

ASTM E2246-11(2018)

Scope

Strain gradient values are an aid in the design and fabrication of MEMS devices.

1.1 This test method covers a procedure for measuring the strain gradient in thin, reflecting films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which can be imaged using an optical interferometer. Measurements from cantilevers that are touching the underlying layer are not accepted.

1.2 This test method uses a non-contact optical interferometer with the capability of obtaining topographical 3-D data sets. It is performed in the laboratory.

This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

ASTM E2246-05 history

• 2018 ASTM E2246-11(2018) Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer
• 2011 ASTM E2246-11e1 Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer
• 2011 ASTM E2246-11 Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer
• 2005 ASTM E2246-05 Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer
• 2002 ASTM E2246-02 Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer