ASTM D5127-13
Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries

Standard No.

ASTM D5127-13

Release Date

2013

Published By

American Society for Testing and Materials (ASTM)

Status

Be replaced

Replace By

ASTM D5127-13(2018)

Latest

ASTM D5127-13(2018)

Scope

4.1 This guide recommends the water quality required for the electronics and microelectronics industries. High-purity water is required to prevent contamination of products during manufacture, since contamination can lead to an unacceptable, low yield of electronic devices.

4.2 The range of water purity is defined in accordance with the manufacturing process. The types of ultra-pure water are defined with respect to device line width. In all cases, the water-quality recommendations apply at the point of distribution.

4.3 The limits on the impurities are related to current contamination specifications and to available analytical methods (either performed in a suitable clean laboratory or by on-line instrumentation). On-line and off-line methods are used in accordance with current industry practice. Concentration of the sample may be required to measure the impurities at the levels indicated in Table 1.

TABLE 1 Requirements for Water at the Point of Distribution in the Electronics and Semiconductor Industries^A

Parameter	Type E-1	Type E-1.1	Type E-1.2B	Type E-1.3B	Type E-2	Type E-3	Type E-4
Linewidth (microns)	1.0–0.5	0.35–0.25	0.18x2...... ASTM D5127-13 Referenced Document ASTM D1129 Standard Terminology Relating to Water ASTM D1193 Standard Specification for Reagent Water ASTM D1976 Standard Test Method for Elements in Water by Inductively-Coupled Argon Plasma Atomic Emission Spectroscopy ASTM D2791 Standard Test Methods for Continuous Determination of Sodium in Water ASTM D3919 Standard Practice for Measuring Trace Elements in Water by Graphite Furnace Atomic Absorption Spectrophotometry ASTM D4191 Standard Test Method for Sodium in Water by Atomic Absorption Spectrophotometry ASTM D4192 Standard Test Method for Potassium in Water by Atomic Absorption Spectrophotometry ASTM D4327 Standard Test Method for Anions in Water by Chemically Suppressed Ion Chromatography ASTM D4453 Standard Practice for Handling of Ultra-Pure Water Samples ASTM D4517 Standard Test Method for Low-Level Total Silica in High-Purity Water by Flameless Atomic Absorption Spectroscopy ASTM D5173 Standard Test Method for On-Line Monitoring of Carbon Compounds in Water by Chemical Oxidation, by UV Light Oxidation, by Both, or by High Temperature Combustion Followed by Gas Phase NDIR or by Electrolytic Conductivity ASTM D5196 Standard Guide for Biomedical Grade Water ASTM D5391 Standard Test Method for Electrical Conductivity and Resistivity of a Flowing High Purity Water Sample ASTM D5462 Standard Test Method for On-Line Measurement of Low-Level Dissolved Oxygen in Water ASTM D5542 Standard Test Methods for Trace Anions in High Purity Water by Ion Chromatography ASTM D5544 Standard Test Method for On-Line Measurement of Residue After Evaporation of High-Purity Water ASTM D5673 Standard Test Method for Elements in Water by Inductively Coupled Plasma8212;Mass Spectrometry ASTM D5996 Standard Test Method for Measuring Anionic Contaminants in High-Purity Water by On-Line Ion Chromatography ASTM D5997 Standard Test Method for On-Line Monitoring of Total Carbon, Inorganic Carbon in Water by Ultraviolet, Persulfate Oxidation, and Membrane Conductivity Detection ASTM F1094 Standard Test Methods for Microbiological Monitoring of Water Used for Processing Electron and Microelectronic Devices by Direct Pressure Tap Sampling Valve and by the Presterilized Plastic Bag Method ASTM D5127-13 history 2018 ASTM D5127-13(2018) Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries 2013 ASTM D5127-13 Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries 2012 ASTM D5127-12 Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries 2007 ASTM D5127-07 Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries 1999 ASTM D5127-99 Standard Guide for Ultra Pure Water Used in the Electronics and Semiconductor Industry Copyright ©2024 All Rights Reserved