ASTM D5127-07
Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
- Standard No.
- ASTM D5127-07
- Release Date
- 2007
- Published By
- American Society for Testing and Materials (ASTM)
- Status
- Replace By
- ASTM D5127-12
- Latest
- ASTM D5127-13(2018)
- Scope
1.1 This guide provides recommendations for water quality related to electronics and semiconductor-industry manufacturing. Six classifications of water are described, including water for line widths as low as 0.09 micron. In all cases, the recommendations are for water at the point of distribution (POD).
1.2 Water is used for washing and rinsing of semiconductor components during manufacture. Water is also used for cleaning and etching operations, making steam for oxidation of silicon surfaces, preparing photomasks, and depositing luminescent materials. Other applications are in the development and fabrication of solid-state devices, thin-film devices, communication lasers, light-emitting diodes, photo-detectors, printed circuits, memory devices, vacuum-tube devices, or electrolytic devices.
1.3 Users needing water qualities different from those described here should consult other water standards, such as Specification D 1193 and Guide D 5196.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
ASTM D5127-07 Referenced Document
- ASTM D1129 Standard Terminology Relating to Water
- ASTM D1193 Standard Specification for Reagent Water
- ASTM D1976 Standard Test Method for Elements in Water by Inductively-Coupled Argon Plasma Atomic Emission Spectroscopy
- ASTM D2791 Standard Test Methods for Continuous Determination of Sodium in Water
- ASTM D3919 Standard Practice for Measuring Trace Elements in Water by Graphite Furnace Atomic Absorption Spectrophotometry
- ASTM D4191 Standard Test Method for Sodium in Water by Atomic Absorption Spectrophotometry
- ASTM D4192 Standard Test Method for Potassium in Water by Atomic Absorption Spectrophotometry
- ASTM D4327 Standard Test Method for Anions in Water by Chemically Suppressed Ion Chromatography
- ASTM D4453 Standard Practice for Handling of Ultra-Pure Water Samples
- ASTM D4517 Standard Test Method for Low-Level Total Silica in High-Purity Water by Flameless Atomic Absorption Spectroscopy
- ASTM D5173 Standard Test Method for On-Line Monitoring of Carbon Compounds in Water by Chemical Oxidation, by UV Light Oxidation, by Both, or by High Temperature Combustion Followed by Gas Phase NDIR or by Electrolytic Conductivity
- ASTM D5196 Standard Guide for Biomedical Grade Water
- ASTM D5391 Standard Test Method for Electrical Conductivity and Resistivity of a Flowing High Purity Water Sample
- ASTM D5462 Standard Test Method for On-Line Measurement of Low-Level Dissolved Oxygen in Water
- ASTM D5542 Standard Test Methods for Trace Anions in High Purity Water by Ion Chromatography
- ASTM D5544 Standard Test Method for On-Line Measurement of Residue After Evaporation of High-Purity Water
- ASTM D5673 Standard Test Method for Elements in Water by Inductively Coupled Plasma8212;Mass Spectrometry
- ASTM D5996 Standard Test Method for Measuring Anionic Contaminants in High-Purity Water by On-Line Ion Chromatography
- ASTM D5997 Standard Test Method for On-Line Monitoring of Total Carbon, Inorganic Carbon in Water by Ultraviolet, Persulfate Oxidation, and Membrane Conductivity Detection
- ASTM F1094 Standard Test Methods for Microbiological Monitoring of Water Used for Processing Electron and Microelectronic Devices by Direct Pressure Tap Sampling Valve and by the Presterilized Plastic Bag Method
ASTM D5127-07 history
- 2018 ASTM D5127-13(2018) Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
- 2013 ASTM D5127-13 Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
- 2012 ASTM D5127-12 Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
- 2007 ASTM D5127-07 Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
- 1999 ASTM D5127-99 Standard Guide for Ultra Pure Water Used in the Electronics and Semiconductor Industry
