BS ISO 16413:2013
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements alignment and positioning, data collection, data analysis and reporting

Standard No.

BS ISO 16413:2013

Release Date

2013

Published By

British Standards Institution (BSI)

Status

Be replaced 2020-08

Replace By

BS ISO 16413:2020

Latest

BS ISO 16413:2020

BS ISO 16413:2013 history

• 2020 BS ISO 16413:2020 Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
• 2013 BS ISO 16413:2013 Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements alignment and positioning, data collection, data analysis and reporting