BS ISO 16413:2020
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
- Standard No.
- BS ISO 16413:2020
- Release Date
- 2020
- Published By
- British Standards Institution (BSI)
- Latest
- BS ISO 16413:2020
- Scope
- What is ISO 16413 about? ISO 16413 is an international standard that discusses the evaluation of thickness, density and interface width of thin films by X-ray reflectometry. ISO 16413 specifies a method for the evaluation of thickness, density and interface width layer and multi-layered thin films which have a thickness between approximately 1nm and 1 μm, on flat substrates, using X-Ray Reflectometry (XRR). ISO 16413 uses a monochromatic, collimated beam, scanning an angle or a scattering vector. Note 1: A convergent beam with parallel data collection using a distributed detector or scanning wavelength, are not described under ISO 16413. Note 2: Proprietary techniques are not desc...
BS ISO 16413:2020 history
- 2020 BS ISO 16413:2020 Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
- 2013 BS ISO 16413:2013 Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements alignment and positioning, data collection, data analysis and reporting
