IEC 62047-10:2011/COR1:2012
Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials; Corrigendum 1
- Standard No.
- IEC 62047-10:2011/COR1:2012
- Release Date
- 2012
- Published By
- International Electrotechnical Commission (IEC)
- Latest
- IEC 62047-10:2011/COR1:2012
IEC 62047-10:2011/COR1:2012 history
- 2012 IEC 62047-10:2011/COR1:2012 Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials; Corrigendum 1
- 2011 IEC 62047-10:2011 Dispositifs à semiconducteur – Dispositifs microélectromécaniques – Partie 10: Essai de compression utilisant la technique des micro-piliers pour les matériaux des MEMS (Edition 1.0)
