General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
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GB/T 26533-2011
Scope
This standard specifies the general surface analysis method of Auger Electron Spectroscopy (AES, Auger Electron Spectroscopy) using electron beam as the excitation source. This standard applies to Auger electron spectrometer.
GB/T 26533-2011 Referenced Document
ASTM E1078-02 Standard Guide for Specimen Preparation and Mounting in Surface Analysis*, 2024-04-19 Update
ASTM E1829-02 Standard Guide for Handling Specimens Prior to Surface Analysis*, 2024-04-19 Update
ISO 18116:2005 Surface chemical analysis - Guidelines for preparation and mounting of specimens for analysis
ISO/TR 15969:2001 Surface chemical analysis - Depth profiling - Measurement of sputtered depth
ISO/TR 18394:2006 Surface chemical analysis - Auger electron spectroscopy - Derivation of chemical information
ISO/TR 19319:2003 Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral resolution, analysis area, and sample area viewed by the analyser
GB/T 26533-2011 history
2011GB/T 26533-2011 General rules for Auger electron spectroscopic analysis