EN 62047-1:2006
Semiconductor devices - Micro-electromechanical devices Part 1: Terms and definitions

Standard No.

EN 62047-1:2006

Release Date

2006

Published By

European Committee for Electrotechnical Standardization（CENELEC）

Status

Be replaced

Replace By

EN 62047-1:2016

Latest

EN 62047-1:2016

EN 62047-1:2006 history

• 2016 EN 62047-1:2016 Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
• 2006 EN 62047-1:2006 Semiconductor devices - Micro-electromechanical devices Part 1: Terms and definitions