EN 62047-1:2016
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

Standard No.

EN 62047-1:2016

Release Date

2016

Published By

European Committee for Electrotechnical Standardization（CENELEC）

Latest

EN 62047-1:2016

Scope

IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition: a) removal of ten terms; b) revision of twelve terms; c) addition of sixteen new terms.

EN 62047-1:2016 history

• 2016 EN 62047-1:2016 Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
• 2006 EN 62047-1:2006 Semiconductor devices - Micro-electromechanical devices Part 1: Terms and definitions