BS EN 62374:2007
Semiconductor devices - Time dependent dielectric breakdown (TDDB) test for gate dielectric films

Standard No.

BS EN 62374:2007

Release Date

2008

Published By

British Standards Institution (BSI)

Status

Be replaced 2008-10

Replace By

BS EN 62374:2008

Latest

BS EN 62374:2008

Scope

This International Standard provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure.

BS EN 62374:2007 history

• 2008 BS EN 62374:2008 Semiconductor devices. Time dependent dielectric breakdown (TDDB) test for gate dielectric films
• 2008 BS EN 62374:2007 Semiconductor devices - Time dependent dielectric breakdown (TDDB) test for gate dielectric films