ASTM F1152-93(2001)
Standard Test Method for Dimensions of Notches on Silicon Wafers
- Standard No.
- ASTM F1152-93(2001)
- Release Date
- 1993
- Published By
- American Society for Testing and Materials (ASTM)
- Status
- Replace By
- ASTM F1152-02
- Latest
- ASTM F1152-02
- Scope
1.1 This test method covers a nondestructive procedure to determine whether or not the dimensions of fiducial notches on silicon wafers fall within specified limits.
1.2 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.
1.3 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
ASTM F1152-93(2001) Referenced Document
- ASTM E122 Standard Practice for Calculating Sample Size to Estimate, With a Specified Tolerable Error, the Average for Characteristic of a Lot or Process*， 2000-10-10 Update
ASTM F1152-93(2001) history
- 1970 ASTM F1152-02
- 1993 ASTM F1152-93(2001) Standard Test Method for Dimensions of Notches on Silicon Wafers
- 1993 ASTM F1152-93 Standard Test Method for Dimensions of Notches on Silicon Wafers
