ASTM F1152-02
- Standard No.
- ASTM F1152-02
- Release Date
- 1970
- Published By
- /
- Latest
- ASTM F1152-02
- Scope
- Full Description This standard was transferred to SEMI (www.semi.org) May 20031.1 This test method covers a nondestructive procedure to determine whether or not the dimensions of fiducial notches on silicon wafers fall within specified limits. 1.2 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only. 1.3 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
ASTM F1152-02 history
- 1970 ASTM F1152-02
- 1993 ASTM F1152-93(2001) Standard Test Method for Dimensions of Notches on Silicon Wafers
- 1993 ASTM F1152-93 Standard Test Method for Dimensions of Notches on Silicon Wafers
