IEC 60748-22-1:1991 Semiconductor devices; integrated cirucits; part 22: section 1: blank detail specification for film integrated circuits and hybrid film integrated circuits on the basis of the capability approval procedures
1997IEC 60748-22-1:1997 Semiconductor devices - Integrated circuits - Part 22-1: Blank detail specification for film integrated circuits and hybrid film integrated circuits on the basis of the capability approval procedures
1991IEC 60748-22-1:1991 Semiconductor devices; integrated cirucits; part 22: section 1: blank detail specification for film integrated circuits and hybrid film integrated circuits on the basis of the capability approval procedures