VDI/VDE 2655 BLATT 1.3-2020
Optical measurement technology on microtopographies - calibration of area-measuring interferometers and interference microscopes for shape measurement

Standard No.

VDI/VDE 2655 BLATT 1.3-2020

Release Date

2020

Published By

SCC

Latest

VDI/VDE 2655 BLATT 1.3-2020

VDI/VDE 2655 BLATT 1.3-2020 history

• 2020 VDI/VDE 2655 BLATT 1.3-2020 Optical measurement technology on microtopographies - calibration of area-measuring interferometers and interference microscopes for shape measurement
• 2018 VDI/VDE 2655 BLATT 1.3-2018 Optische Messtechnik an Mikrotopographien - Kalibrieren von flaechenhaft messenden Interferometern und Interferenzmikroskopen fuer die Formmessung