ASTM E2245-11(2018) PDF

Scope: 1.1 This test method covers a procedure for measuring the compressive residual strain in thin films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which can be imaged using an optical interferometer, also called an interferometric microscope. Measurements from fixed-fixed beams that are touching the underlying layer are not accepted. 1.2 This test method uses a non-contact optical interferometric microscope with the capability of obtaining topographical 3-D data sets. It is performed in the laboratory. 1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. 1.4 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

ASTM E2245-11(2018) Referenced Document

ASTM E2244 Standard Test Method for In-Plane Length Measurements of Thin, Reflecting Films Using an Optical Interferometer*， 2024-04-21 Update
ASTM E2246 Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer*， 2024-04-21 Update
ASTM E2444 Terminology Relating to Measurements Taken on Thin, Reflecting Films*， 2024-04-21 Update
ASTM E2530 Standard Practice for Calibrating the Z-Magnification of an Atomic Force Microscope at Subnanometer Displacement Levels Using Si(111) Monatomic Steps *， 2024-04-21 Update

2018 ASTM E2245-11(2018) Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer
2011 ASTM E2245-11e1 Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer
2011 ASTM E2245-11 Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer
2005 ASTM E2245-05 Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer
2002 ASTM E2245-02 Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer