JIS K 0143:2023
Surface chemical analysis -- Secondary-ion mass spectrometry -- Determination of boron atomic concentration in silicon using uniformly doped materials

Standard No.

JIS K 0143:2023

Release Date

2023

Published By

Japanese Industrial Standards Committee (JISC)

Latest

JIS K 0143:2023

JIS K 0143:2023 history

• 2023 JIS K 0143:2023 Surface chemical analysis -- Secondary-ion mass spectrometry -- Determination of boron atomic concentration in silicon using uniformly doped materials
• 2000 JIS K 0143:2000 Surface chemical analysis -- Secondary ion mass spectrometry -- Determination of boron atomic concentration in silicon using uniformly doped materials