DS/ISO 23216:2021
Carbon based films – Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry

Standard No.

DS/ISO 23216:2021

Release Date

2021

Published By

Danish Standards Foundation

Latest

DS/ISO 23216:2021

DS/ISO 23216:2021 history

• 2021 DS/ISO 23216:2021 Carbon based films – Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry