PNS ISO 14644-15:2021
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration

Standard No.

PNS ISO 14644-15:2021

Release Date

2021

Published By

PH-BPS

Latest

PNS ISO 14644-15:2021

Scope

This Standard provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemica

PNS ISO 14644-15:2021 history

• 2021 PNS ISO 14644-15:2021 Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration