NF C96-050-26*NF EN 62047-26:2016
Semiconductor devices - Micro-electromechanical devices - Part 26 : description and measurement methods for micro trench and needle structures

Standard No.

NF C96-050-26*NF EN 62047-26:2016

Release Date

2016

Published By

Association Francaise de Normalisation

Latest

NF C96-050-26*NF EN 62047-26:2016

NF C96-050-26*NF EN 62047-26:2016 history

• 2016 NF C96-050-26*NF EN 62047-26:2016 Semiconductor devices - Micro-electromechanical devices - Part 26 : description and measurement methods for micro trench and needle structures