NF X10-507:1975
Vacuum technology - Sputter-ion pumps - Measurement of performance characteristics.

Standard No.

NF X10-507:1975

Release Date

1975

Published By

Association Francaise de Normalisation

Status

Withdraw

Latest

NF X10-507:1975

NF X10-507:1975 history

• 1975 NF X10-507:1975 Vacuum technology - Sputter-ion pumps - Measurement of performance characteristics.