ISO 13083:2015
Surface chemical analysis - Scanning probe microscopy - Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
- Standard No.
- ISO 13083:2015
- Release Date
- 2015
- Published By
- International Organization for Standardization (ISO)
- Latest
- ISO 13083:2015
- Scope
- This International Standard describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.
ISO 13083:2015 Referenced Document
- ISO 18115-2:2013 Surface chemical analysis.Vocabulary.Part 2: Terms used in scanning-probe microscopy
- ISO 18516:2006 Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral resolution
ISO 13083:2015 history
- 2015 ISO 13083:2015 Surface chemical analysis - Scanning probe microscopy - Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
