The subject of the present VDI guideline is carbon films which are deposited by the vacuum deposition method (PVD or CVD). These modern coating systems extend from extremely hard diamond films at one end of the scale, passing through a wide variety of mostly hydrogenated amorphous carbon films before reaching soft graphite films at the other end. This guideline pursues two aims: firstly, it should provide a uniform classification and nomenclature for carbon films; secondly, it should enable the prospective user of coated workpieces to make a preliminary selection of suitable carbon film types. Essentially this guideline deals with those coatings which are produced on an industrial scale. This means we must, for example, exclude a-C:X and ta- C:X films (X = Si, O, F, N, B, and so on) which are yet under industrial development or which currently have only a very limited application.
DIN 50431:1988 Testing of semiconductor materials; measurement of the resistivity of silicon or germanium single crystals by means of the four probe/direct current method with collinear array
DIN EN ISO 14577-1:2003 Metallic materials - Instrumented indentation test for hardness and materials parameters - Part 1: Test method (ISO 14577-1:2002); German version EN ISO 14577-1:2002
DIN EN ISO 1463:2004 Metallic and oxide coatings - Measurement of coating thickness - Microscopical method (ISO 1463:2003); German version EN ISO 1463:2004
DIN EN ISO 2064:2000 Metallic and other non-organic coatings - Definitions and conventions concerning the measurement of thickness (ISO 2064:1996); German version EN ISO 2064:2000
DIN EN ISO 3497:2001 Metallic coatings - Measurement of coating thickness - X-ray spectrometric methods (ISO 3497:2000); German version EN ISO 3497:2000
DIN EN ISO 3543:2001 Metallic and non-metallic coatings - Measurement of thickness - Beta backscatter method (ISO 3543:2000); German version EN ISO 3543:2000
DIN EN ISO 3882:2003 Metallic and other inorganic coatings - Review of methods of measurement of thickness (ISO 3882:2003); German version EN ISO 3882:2003
DIN EN ISO 4288:1998 Geometrical Product Specifications (GPS) - Surface texture: Profile method - Rules and procedures for the assessment of surface texture (ISO 4288:1996); German version EN ISO 4288:1997
DIN ISO 513:2005 Classification and application of hard cutting materials for metal removal with defined cutting edges - Designation of the main groups and groups of application (ISO 513:2004);English version of DIN ISO 513:2005
VDI 2840-2005 history
2023VDI 2840-2023 Carbon films - Fundamentals, film types, and properties
2012VDI 2840-2012 Carbon films - Basic knowledge, film types and properties
2005VDI 2840-2005 "Carbon films - Basic knowledge, coating types and properties"
2004VDI 2840-2004 Kohlenstoffschichten - Grundlagen@ Schichttypen und Eigenschaften