VDI/VDE 3717 Blatt 6-1999
Mask engineering - Pellicles
- Standard No.
- VDI/VDE 3717 Blatt 6-1999
- Release Date
- 1999
- Published By
- Association of German Mechanical Engineers
- Status
- Latest
- VDI/VDE 3717 Blatt 6-1999
- Replace
- VDI/VDE 3717 Blatt 6-1990
- Scope
- These specifications cover the general requirements for pellicles used as a protection on photomasks. The specifications widely correspond to the standardizations prepared by SEMI (Semiconductor Equipment and Materials Institute) in the USA. Applications using deep-UV-exposure (wayelength <=360 nm) are not yet taken into account.
VDI/VDE 3717 Blatt 6-1999 Referenced Document
- VDI 2083 Blatt 1-1995 Reinraumtechnik - Grundlagen@ Definitionen und Festlegungen der Reinheitsklassen
- VDI 2083 Blatt 10-1998 Cleanroom technology - High-Purity/Ultra-High-Purity (HP-/UHP-)media supply systems
- VDI 2083 Blatt 11-1999 Cleanroom technology - Quality assurance
- VDI 2083 Blatt 12-1998 Reinraumtechnik - Sicherheits- und Umweltschutzaspekte
- VDI 2083 Blatt 2-1996 Reinraumtechnik - Bau@ Betrieb und Instandhaltung
- VDI 2083 Blatt 3-1993 Contamination control; measuring techniques for clean air rooms
- VDI 2083 Blatt 4-1996 Reinraumtechnik - Oberflaechenreinheit
- VDI 2083 Blatt 5-1996 Cleanroom technology - Thermal comfort
- VDI 2083 Blatt 6-1996 Cleanroom technology - Personnel at the clean work place
- VDI 2083 Blatt 7-1992 Reinraumtechnik; Reinheit von Prozessmedien
- VDI 2083 Blatt 9-1991 Clean room engineering; quality@ production and distribution of superpurity water
VDI/VDE 3717 Blatt 6-1999 history
- 1999 VDI/VDE 3717 Blatt 6-1999 Mask engineering - Pellicles
- 1990 VDI/VDE 3717 Blatt 6-1990 Maskentechnik; Pellicles
